• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    PURPOSE: A thickness measuring apparatus for multi-layered coating glass is provided to effectively and precisely measure thickness of multi-layered coating glass by using a non-contact type hologram optical system. CONSTITUTION: A thickness measuring apparatus includes a fixture(20) installed at one side of a base(10) in order to fix flat-type glass, on which thin films including a silica film and an ITO film are coated. The fixture(20) has a pair of supporters(22) installed on an upper surface of the base(10) and a pair of supporting members(24), which is vertically installed in order to support both edges of flat-type glass. The supporters(22) are formed at upper surfaces thereof with inclined planes(22a). The inclined planes(22a) are downwardly inclined. The base(10) is also inclined in one direction in order to allow glass to be closely adjacent to the supporting members(24). A hologram optical system(30) is provided to measure thickness of glass fixed to the fixture(20). The hologram optical system(30) consists of hologram optical elements(32).
    公开号:KR20030060214A
    申请号:KR1020020000766
    申请日:2002-01-07
    公开日:2003-07-16
    发明作者:정송호；하종은；김택천；백주열；최재석；최장수
    申请人:삼성코닝 주식회사；
    IPC主号:
    专利说明:

    Thickness measuring device of multilayer coating glass {APPARATUS FOR MEASURING THICKNESS OF MULTI-LAYER FILM COATED GLASS}
    [16] The present invention relates to a thickness measuring apparatus of a multilayer coating glass, and more particularly, to a thickness measuring apparatus of a multilayer coating glass for optically measuring the thickness of a flat glass on which a multilayer thin film is coated. .
    [17] As is well known, in the manufacturing field of display devices such as thin film transistor-liquid crystal display (TFT-LCD), plasma display panel (PDP), and electro luminescent (EL), silica on the surface of flat glass, for example, as an insulating film An ITO (Indium tin oxide) film is coated with a (SiO 2 ) film and a conductive film.
    [18] Such multilayer coating glass should be maintained in a shape designed for flatness and thickness so that the incident light can have a uniform light intensity distribution in the front of the backlight. Deformation of warpage, cracks, etc. and errors in the thickness of glass and thin film generated during the shaping process of glass are important factors to improve the performance of the backlight. In addition, high luminance cannot be expected. Therefore, after measuring the thickness of glass in order to manufacture high quality multilayer coating glass, the defect is found and the cause is identified and corrected.
    [19] The thickness measurement of the conventional multilayer coating glass is performed by sampling inspection. In order to measure the thickness of the glass by sampling inspection, it is necessary to take a sample of several pieces of glass, for example, a center, four corners, and four edges. There is a problem that requires excessive personnel and time. In particular, the collection and handling of the sample requires careful attention and requires skilled work, as well as the collection of the sample is performed in a separate collection room from the measurement room, which is inefficient.
    [20] On the other hand, in order to determine the passability by comparing the measurement result of glass with the criterion of determination, it is necessary to collect the data of the measured results for each part of the individually measured glass and make it into data, and then compare it with the criterion of determination. Excessive time was spent. If the measurement result of glass is failed, it is necessary to identify the cause and take corrective action in the manufacturing process, or to delay the corrective action because the measurement result cannot be delivered to the manufacturing process quickly. There was a problem that causes enormous disruption in manufacturing. In addition, since the sampling inspection of the glass cannot completely guarantee the reliability of the total quantity, a total inspection of the glass is required, but a measuring apparatus capable of performing the total inspection of the glass has not been developed.
    [21] The present invention has been made to solve the various problems of the prior art as described above, an object of the present invention to provide a thickness measuring device of the multilayer coating glass that can accurately and efficiently measure the thickness of the multilayer coating glass. have.
    [22] Another object of the present invention is to provide a thickness measuring apparatus of a multilayer film-coated glass which can quickly measure the thickness of several places without taking a sample of glass by a non-contact hologram optical system.
    [23] Still another object of the present invention is to provide a thickness measuring apparatus of a multilayer coating glass, which can automatically select good or defective products of the multilayer coating glass, and can easily perform a full inspection of the glass.
    [24] Features of the present invention for achieving the above object, the fixing means for fixing the glass; A hologram optical system for outputting a focusing error signal when the glass is positioned in focus; Rectangular coordinate movement means for orthogonally moving the hologram optical system with respect to the glass; A thickness measuring device for a multilayer film-coated glass comprising a computer which processes a focus error signal from a hologram optical system by a program to calculate the thickness of the glass.
    [1] 1 is a perspective view showing the configuration of a measuring device according to the present invention,
    [2] 2 is a side view showing the configuration of a measuring apparatus according to the present invention;
    [3] 3 is a perspective view showing the configuration of a hologram optical system in the measuring apparatus according to the present invention,
    [4] 4a to 4c are schematic views for explaining the operation of the holographic optical system according to the present invention,
    [5] 5 is a graph of a focus error signal measured by a hologram optical system according to the present invention.
    [6] ♣ Explanation of symbols for the main parts of the drawing ♣
    [7] 1: glass 10: base
    [8] 20: fixing device 22: stand
    [9] 24: support 30: hologram optical system
    [10] 32: hologram element 34: laser diode
    [11] 36: diffraction grating 38: collimator lens
    [12] 40: objective lens 42: photodiode
    [13] 50: Cartesian Coordinate Movement Device 52: First Linear Motion Actuator
    [14] 54: second linear motion actuator 56: third linear motion actuator
    [15] 60: computer 62: monitor
    [25] Hereinafter, a preferred embodiment of the apparatus for measuring the thickness of a multilayer coating glass according to the present invention will be described in detail with reference to the accompanying drawings.
    [26] First, referring to Figures 1 and 2, the measuring device of the present invention is configured on one side of the base (Base: 10) fixed to fix the flat glass 1 is coated with a thin film, such as silica film, ITO film Fixture 20 is provided. The fixing device 20 is a pair of pedestals 22 mounted on the upper surface of the base 10 so as to support the left and right lower ends of the glass 1, and the left and right edges of the glass 1 on the front of the pedestal 22. It consists of a pair of supports 24 that are mounted vertically to support the. An inclined surface 22a is formed on the upper surface of the pedestal 22 so as to be inclined at a predetermined angle from the upper side to the lower side so that the glass 1 can be adhered to the support 24 while sliding by its own weight. And the base 10 is inclined to one side so that the glass 1 can be in close contact with the support 24, the lower side of the base 10 has a height adjusting leg 12 for adjusting the height of the base 10 It is installed.
    [27] 2 and 3, the measuring apparatus of the present invention includes a hologram optical system 30 for measuring the thickness of the glass 1 fixed to the fixing device 20, and the hologram optical system 30. ) Is composed of a hologram optical element 32. The hologram element 32 includes a laser diode (34), a diffraction grating (36), a collimator lens (38), an objective lens (40) and a photo diode (42) as a light source. Consists of. The diffraction grating 36 is composed of a tracking beam generation diffraction grating 36a and an optical path refractive diffraction grating 36b, and includes a laser diode 34, a diffraction grating 36, a collimator lens 38, and an objective lens. 40 and photodiode 42 are housed in barrel 44.
    [28] The laser beam emitted from the laser diode 34 of the hologram element 32 is divided into two sub-beams for the tracking error signal and three beams of the main beam for reading the information signal by the tracking beam generation diffraction grating 36a. . The three beams emitted from the tracking beam generation diffraction grating 36a transmit the optical path refraction grating 36b as zero-order light, and pass through the collimator lens 38 to the glass 1 by the objective lens 40. Condensed The light reflected from the surface of the glass 1 and transmitted again through the objective lens 40 and the collimator lens 38 is focused on the photodiode 42 as the primary diffracted light by the optical path refraction grating 36b.
    [29] Referring again to FIGS. 1 and 2, the measuring apparatus of the present invention includes a Cartesian coordinate movement device 50 that performs a Cartesian coordinate movement of the hologram optical system 30 with respect to the glass substrate 1. The Cartesian coordinate movement device 50 may linearly move along the first linear motion actuator 52 and the first linear motion actuator 52 which are arranged in the X-axis direction on the bottom of the frame 10. The second linear motion actuator 54 arranged in the Y-axis direction so as to move linearly along the second linear motion actuator 54, and the hologram optical system 30 is fixed to the second linear motion actuator 54. It consists of two linear motion actuators 56.
    [30] The first linear motion actuator 52 has a guide rail 52a in the X-axis direction, a slide 52b mounted so as to slide along the guide rail 52a, and a slide 52b. It is composed of a linear motor (Linear motor 52c) that is built in the) to slide the slide (52b) along the guide rail (52a). The second linear motion actuator 54 is provided with a guide rail 54a having one end fixed to the slide 52b of the first linear motion actuator 52 in the Y-axis direction and sliding along the guide rail 54a. The slide 54b is mounted so that the slide 54b can be mounted, and the linear motor 54c, which is built into the slide 54b, slides the slide 54b along the guide rail 54a. The third linear motion actuator 56 includes a guide rail 56a having one end fixed to the slide 54b of the second linear motion actuator 54 in the Y-axis direction, and sliding along the guide rail 56a. And a linear motor 56c mounted on the slide 56b to slide the slide 56b along the guide rails 56a. have.
    [31] In the present embodiment, the first, second and third linear motion actuators 52, 54, and 56 of the Cartesian coordinate movement device 50 rotate by a drive of a servo motor. And a nut for screwing along the ball screw, and a linear motion guide for guiding the movement of the slide engaged with the nut. In addition, the first, second and third linear motion actuators 52, 54, and 56 constitute a linear motion of the slides 52b, 54b, and 56b by racks and pinions instead of ball screws and nuts. You may.
    [32] As shown in FIG. 2, a focus error signal output from the photodiode 42 of the hologram optical system 30 is input to the computer 60 in real time. The computer 60 has a microprocessor, an output device such as a monitor 62, a printer, and an input device such as a keyboard. The computer 70 samples the focus error signal input from the photodiode 42 of the hologram optical system 30 by a program to calculate the distance from the glass 1 and calculate the thickness of the glass 1. In addition, the computer 70 is interfaced with the hologram optical system 30 and the linear motors 52c, 54c, 56c of the first, second, and third linear motion actuators 52, 54, 56 for controlling the measuring device. have.
    [33] Now, the operation of the multilayer film-coated glass measuring apparatus according to the present invention having such a configuration will be described.
    [34] 1 and 2, the inspector fixes the left and right lower ends of the glass 1 to the inclined surfaces 22a of the pedestal 22 and the left and right edges to the support 24. At this time, while the left and right lower ends of the glass 1 slide along the inclined surface 22a of the pedestal 22 by their own weight, the left and right edges are stably in close contact with the support 24 and are fixed. The inclined base 10 assists the sliding of the glass 1 by the inclined surface 22a of the pedestal 22 and the adhesion between the glass 1 and the support 24.
    [35] Next, the thickness of the glass 1 is measured while the holographic optical system 30 is moved by the rectangular coordinate movement by the operation of the rectangular coordinate movement device 50. The thickness of the glass 1 can be measured in several places, for example, a center part, four edge parts, and four edge center parts as a measurement position. The hologram optical system 30 has an offset with respect to the initial position, and in order to set the initial position of the hologram optical system 30 by measuring the offset from the initial position of the hologram optical system 30 using a specimen having a high flatness Correct it.
    [36] The first and second linear motion actuators 52 and 54 of the Cartesian coordinate movement device 50 are operated to move the hologram optical system 30 in a Cartesian coordinate movement. When the linear motor 52c of the first linear motion actuator 52 is driven, the slide 52b slides in the X-axis direction along the guide rail 52a to move the second linear motion actuator 54. When the linear motor 54c of the second linear motion actuator 54 is driven, the slide 54b slides in the Y-axis direction along the guide rail 54a to move the third linear motion actuator 56. Thus, the hologram optical system 30 can be accurately aligned at the measurement position of the glass 1.
    [37] As shown in FIGS. 2 and 4A to 4C, the hologram optical system 30 is positioned at the measurement position of the glass 1 by the first and second linear motion actuators 52 and 54 of the Cartesian coordinate movement device 50. ) Is aligned, and the focal length f 0 of the hologram optical system 30 is transferred with respect to the glass 1 by the operation of the third linear motion actuator 56. When the linear motor 56c of the third linear motion actuator 56 is operated, the slide 56b slides in the Z-axis direction with respect to the glass 1 along the guide rail 56a and approaches the hologram optical system 30. Let's do it.
    [38] Referring to FIG. 3, the laser beam emitted when the laser diode 34 of the hologram optical system 30 is turned on is divided into three beams by the tracking beam generation diffraction grating 36a, and the tracking beam generation diffraction grating ( The three beams emitted from 36a are transmitted through the optical path refraction grating 36b as zero-order light, and are focused on the glass 1 by the objective lens 40 via the collimator lens 38. The light reflected from the surface of the glass 1 and transmitted again through the objective lens 40 and the collimator lens 38 is focused on the photodiode 42 as the primary diffracted light by the optical path refraction grating 36b. The photodiode 42 outputs a focus error signal when the glass 1 is in focus of the hologram optical system 30, thereby obtaining a graph of the focus error signal as shown in FIG.
    [39] In the focus error signal graph of FIG. 5, the first period d 1 is when the focal point of the hologram optical system 30 passes through the front surface A of the glass 1 as shown in FIG. 4B, and the second period ( d 2 ) is when the focal point of the hologram optical system 30 passes through the rear surface B of the glass 1 as shown in FIG. 4C. That is, the first and second sections d 1 and d 2 are sections in which the focal point of the hologram optical system 30 approaches the surface of the glass 1 so that the focal point is precisely formed and then away. At this time, the position where the focal point of the hologram optical system 30 is accurately formed on the front surface A of the glass 1 is the first focal point a, and the position where the focal point is formed on the rear surface B of the glass 1 is the second focal point b). This is called. The conveying distance from the initial position of the hologram optical system 30 to the first focal point a is called the first focal length f 1 , and the conveying distance to the second focal point b is the second focal length f 2 . The distance from the first focal point a to the second focal point b is referred to as the thickness t of the glass 1.
    [40] As described above, the focus error signal is output while the hologram optical system 30 is transferred to the glass 1 by the third linear motion actuator 56 of the rectangular coordinate movement mechanism 50, and the focus error signal is output to the computer 70. Is entered in real time. The computer 70 calculates the thickness of the glass 1 by processing the focus error signal input from the hologram optical system 30 by a program, and when the thickness of one measuring position is measured, the Cartesian coordinate motion is output by the output of the control signal. The first and second linear motion actuators 52, 54 of the instrument 50 are operated to orthogonally move the hologram optical system 30 to the next measurement position. Therefore, the thickness of several places of the glass 1 can be measured quickly and accurately, without a sample being taken, and a full inspection is possible because of the non-destruction of the glass 1. In addition, the computer 60 sorts the good or defective products of the glass 1 according to the measurement result of the glass 1 and displays them on the monitor 62. The inspector can find the cause of the defect of the glass 1 based on the data output by the computer 60, identify the cause, and quickly correct the defect in the molding process or the coating process.
    [41] The above embodiments are merely illustrative of preferred embodiments of the present invention, and the scope of the present invention is not limited to the described embodiments, and various modifications may be made by those skilled in the art within the spirit and scope of the present invention. Modifications, variations, or substitutions may be made, and such embodiments are to be understood as being within the scope of the present invention.
    [42] As described above, according to the thickness measuring apparatus of the multilayer film-coated glass according to the present invention, a focus error signal from the hologram optical system is processed by a computer program while the holographic optical system is orthogonally moved with respect to the glass by the rectangular coordinate movement device. The thickness of glass can be measured accurately and efficiently, and the thickness of several places can be measured quickly by a non-contact hologram optical system. In addition, there is an effect that the good and defective products of the multilayer film-coated glass can be automatically sorted, and the total inspection can be performed by the non-destructive glass.
    权利要求:
    Claims (4)
    [1" claim-type="Currently amended] Fixing means for fixing the glass;
    A hologram optical system for outputting a focus error signal when the glass is positioned at a focal point;
    Orthogonal coordinate movement means for orthogonally moving the hologram optical system with respect to the glass;
    And a computer for processing a focus error signal from the hologram optical system by a program to calculate the thickness of the glass.
    [2" claim-type="Currently amended] The method of claim 1, wherein the fixing means,
    A pair of pedestals having inclined surfaces which support the left and right lower ends of the glass to slide forward;
    Thickness measuring device of the multilayer film-coated glass consisting of a pair of supports vertically mounted to support the left and right edges of the glass on the front of the pedestal.
    [3" claim-type="Currently amended] 3. The thickness measuring apparatus of claim 2, wherein the pedestal of the fixing means and the rectangular coordinate movement means are installed on a base inclined so that the glass can slide toward the support.
    [4" claim-type="Currently amended] According to claim 1, wherein the rectangular coordinate movement means,
    A first linear motion actuator disposed in the X-axis direction with respect to the glass;
    A second linear motion actuator disposed in the Y-axis direction to linearly move along the first linear motion actuator;
    The thickness of the multi-layer coating glass composed of a third linear motion actuator disposed in the Z-axis direction so as to linearly move along the second linear motion actuator to transfer the hologram optical system with respect to the glass, and the hologram optical system is fixed. Measuring device.
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    同族专利:
    公开号 | 公开日
    KR100867197B1|2008-11-06|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2002-01-07|Application filed by 삼성코닝 주식회사
    2002-01-07|Priority to KR1020020000766A
    2003-07-16|Publication of KR20030060214A
    2008-11-06|Application granted
    2008-11-06|Publication of KR100867197B1
    优先权:
    申请号 | 申请日 | 专利标题
    KR1020020000766A|KR100867197B1|2002-01-07|2002-01-07|Apparatus for measuring thickness of multi-layer film coated glass|
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